用化学汽相沉积法在刀具材料表面形成金刚石薄膜

Growth of Diamond Film on Tool Materials by Chemical Vapour Deposition

本文采用热解化学气相沉积方法，以甲烷和氢气为原料气体，在刀具材料──硬质 合金、金刚石烧结体和立方氮化硼烧结体表面形成了金刚石薄膜，而且研究了金刚石在 上述材料表面上的生长特性。

In the present paper,diamond films have been synthesized on tool materials such as tungsten carbide, sintered diamond and sintered c-BN by thermal chemical vapour deposition from the mixture gas of methane and hydrogen, and the growth features of diamond ware studied.