高精度、全保偏的马赫——曾特尔光纤干涉仪

Precise all Polarize Mach-Zehnder Optical Fiber Interferometer

在传统干涉仪的基础上,利用保偏光纤传输,λ/4波片、透镜、全反射镜组成探头,具有特殊参数的全保偏光纤耦合器耦合的高精度光纤干涉仪,对参考光与信号光进行差动放大,经数据处理所进行的微小位移的测量结果可达10^(-3)μm。

An optical fiber interferometer of high accuracy was proposed based on the traditional one. An all polarize optical fiber coupler with special parameters and a probe consisting of a quarter-wave plate, a lens and a fully-re-fleeter mirror were employed according to polarized optical fiber trans mission. The reference light and the signal were deferentially amplified. The measuring results of the mini-transition after data processing can be 10-3μm.