激光精密打孔中工件的热效应研究

Investigation of the thermal effect of working on laser fine drilling

本文首先研究了工件加热效应对激光精密打孔的影响与作用。实验表明；陶瓷、金属等材料加热效应可降低材料汽化阈值2－3个量级，并可用于加工小于50μm的微孔．

In this paper, we study the acts of thermal effect of working on laster fine drinlling for the first time. The experiment shows that. the material vaporigation threshold of,ce ramic and metals 2-3 oder of magnitude have been reduced, and the smaller microholes in 5o um have also been achieved by using the thermal effect of working.