EI型扩散硅力敏器件工艺技术研究

The Study of the Process Technology for EI-Type Silicon Pressure Sensors

本文叙述的EI型扩散硅力敏器件为工业变送器配套使用的微差压传感器,其压力量程为0.6kPa,线性优于0.5％。该器件填补国内空白,器件性能指标达到国际80年代中期同类产品先进水平。

This paper describes an EI-type silicon micro differential pressure sensor suitable to be applied in industrial transmitters. The measurement range of the sensor is 0. 6kPa, and the linearity is better than 0. 5%. The sen sor filled in the gap of sensing technology in China.