摘要
近来,半导体科学主要的发展方向是制作高完整性和大面积杂质均匀的衬底材料和超薄外廷材料,并研究它们的特殊性能。本文主要对半导体材料的发展作一简单评述。
The developing direction of semiconductors is mainly to research and produce the substrate materials with high completion, and uniform impurity profiled on the large areas andultrathin epitaxial materials. This paper gives a simple comment on these materials.
出处
《半导体情报》
1992年第6期1-5,共5页
Semiconductor Information
关键词
半导体
材料
工艺
Semiconductor materials: Semiconductor technology
