微热板的热测试和热分析

THERMAL ANALYSIS AND MEASUREMENT OF MICRO-HOTPLATE

随着近代高新技术的发展，要求各种探测器微型化。微加工技术的进步，使得微器件制造有了可能，于是微传感器就应运而生了。微热板作为一种微型加热器在微传感器中有着极为重要的作用。它的温度分布和热特性直接影响微传感器的工作性能，为此微热板的热测试和热分析成为微传感器的研制、使用和评价所必不可少的工作。 本文件对研制中的气体传感器的微热板，用红外热成像技术进行热测试和分析，获得气体传感器微热板的微小区域的温度分布，为传感器的研制提供了可靠的依据。

With the development of high technologys sensors become more and more small. The progress in micro-fabrication technology enables devices to be miniaturized. As a micro-heater, the micro-hotplate is a very important component in micro-sensor. Its temperature distribution and thermal characteristics directly determine the micro-sensor's behavior, thus, thermal measurement and analysis of micro-hotplate become an indispensable step in the design, application and evaluation of micro-sensors. In this paper, infrared thermograph is applied in the thermal analysis and measurement of microhotplate of a gas sensor. The temperature distribution of small area of micro-hotplate is measured, which provide a reliable basis for the development of micro-sensor.