摘要
论迷了超精密加工的重要意义、主要方法、一些关键技术及在机械制造技术中的作用和地位；介绍了一种直线电机直接驱动的新型超精密进给机构的工作原理和基本结构，较好地解决了超精密加工的精确移动和定位问题。
The technical field and main methods and some key technology and position and role about the ultraprecision Manufacturing are described in this study firstly. Then a new principle and configuration of a linear motor - driven ultraprecision feeding mechanism is introduced. It will solve the problem of precision moving and positioning in ultraprecision Manufacturing.
出处
《机械设计与制造》
2001年第2期59-60,共2页
Machinery Design & Manufacture
关键词
超精密加工
直线电机
进给机构
机械制造
Ultraprecision mauufacturing
Linear motor
Feeding mechanism
Table
