厚膜电容式集成压力传感器感压元件研究

Research on Pressure-Sensitive Sensor of Integrated Capacitance Pressure Transducer Based on Thick Film Technology

采用厚膜技术研制新型电容式集成压力传感器用感压元件。具有抗干扰能力强 ,灵敏度高 ,受分布电容、寄生电容影响小 ,耐腐蚀 ,耐高温的特点。文中主要介绍其电容式感压元件的原理、设计 ,并对非线性等相关技术及工艺问题进行了探讨。

By using thick film technology to develop a new style of pressure-sensitive sensor of integrated capacitance pressure transducer. The style of capacitance sensor has anti-interference, high sensitivity, low prarasitic capacitance, low distributed capacitance, resistant to elevated temperatures and corrosion resistant. In this paper, the principle and designing of this style of pressure-sensitive sensor is described, and the technology such as nonlinear etc is discussed as well.