摘要
本文综述了微机械的发展、分类及基本特征。介绍了研究微机械所涉及的关键技术 ,并预测了微机械广泛的应用前景。
In this article, the development, classification and basic characteristic of MEMS are summarized. The key technology on MEMS studying is introduced. Its wide application prospect is also forecasted.
出处
《传动技术》
2001年第1期25-33,共9页
Drive System Technique
