摘要
利用射频 /直流磁控溅射法制备了 316 L不锈钢 / Si O2 复合薄膜 ,并对其组织、相结构和力学性能进行了测试分析。结果表明 :直流磁控溅射 316 L不锈钢薄膜呈柱状晶结构 ,主要由 Fe- Cr和 - Fe相构成 ,在 Fe-Cr(110 )晶面出现明显择优取向 ;由于 Si O2 的掺合 ,使 316 L不锈钢 / Si O2 复合薄膜柱状晶变细小 ,出现明显的二次柱状晶 ,Fe- Cr的 (110 )晶面择优取向消失 ,而 Fe- Cr的 (2 11)晶面衍射峰强度明显增强 ,316不锈钢膜硬度明显高于 316 L块体 ,掺入 Si O2 的金属
L stainless steel/SiO 2 ceramic composite film was prepared by RF/DC sputtering. Microstructure and properties of 316L stainless steal/SiO 2 ceramic composite film were investigated. Results show that:the microstructure with columnar structures of the 316L stainless steel prepared by magnetron sputtering was formed with Fe Cr phase and Fe phase, and orientation(110) of Fe Cr phase had priority. The 316L stainless steel film with trace SiO 2 ceramic addition had fine columnar grains which indicated distinctly a preferred orientation(211). Wear resistance of the composite film was improved greatly, while the hardness improved slightly, but the hardness of 316L film was more higher than 316L bulk.
出处
《真空》
CAS
北大核心
2001年第2期30-32,共3页
Vacuum
基金
国家 8 6 3计划! (86 3- 715 - 0 0 6 - 0 190 )
广东教育厅重点项目! (975 1)
