摘要
高透明低方阻 ITO- Ag- ITO柔性薄膜具有广泛的用途。本文介绍了膜系设计、工艺参数及控制。对设备结构也做了简要叙述。测试结果表明 ,ITO- Ag- ITO多层膜采用连续卷绕镀的方法生产 ,性能优异 ,工艺稳定 ,系统可靠。
The flexible thin films of high transparent and low square resistance are widely used. Film construction and control of process parameters are introduced and device of making films is also introduced. Measurement result indicates that the optical and electrical properties of ITO Ag ITO multi layer films are excellent, process is very stable by rolling coating, operation system is dependable.
出处
《真空》
CAS
北大核心
2001年第2期36-38,共3页
Vacuum
关键词
银
ITO膜
柔性薄膜
连续卷绕镀膜
镀膜工艺
磁控溅射
high transparent
low square resistance
ITO Ag ITO flexible thin film
rolling coating
