摘要
SnCl_4·5H_2O和SnF_2的水溶液经超声振荡雾化后喷射到高温平板玻璃衬底上热解形成掺氟二氧化锡(记作SnO_2∶F)透明导电热反射膜。喷镀时的衬底温度对膜的微观结构起决定作用。衬底温度300℃时形成非晶膜,高于400℃时形成多晶膜且结晶度随衬底温度升高而提高。结晶度高的多晶膜导电率达10~3Ω^(-1)cm^(-1),镀有多晶膜的玻璃对可见光(0.3～0.8μm)的透过率比未镀膜的玻璃仅减少10％左右,而红外(2～10μm)反射率比未镀膜的玻璃提高近4倍。膜的这种电学和光学特性与结晶程度有明显的对应性。
The droplets of SnCl_4·5H_2O and SnF_2 solution produced by rupersonic viberation are spray-deposited on hot glass to form a transparent, conducting an(?) heat reflecting film of tin dioxide doped with fluoride. The crystallinity degree of the film is in proportion to substrate temperature during deposition. The film conductivity is high up to 10~3Ω^(-1)cm^(-1)and the transmittance of glass with the film is lower than that without film for visible light, but much higher for infrared.
出处
《红外技术》
CSCD
1991年第1期37-40,共4页
Infrared Technology
关键词
半导体薄膜
热解喷镀
SnO:F
反射膜
Pyrolytically spray deposition Thin films X-ray diffraction Crystallinity
