高温超导红外探测器的研制

The Preparation for High T_o Superconducting Infrared Detector

采用高温超导薄膜YBaCuO和GdBaCuO研制超导红外探测器。将超导膜通过光刻湿法腐蚀成形后,用剥离技术制备金电极并合金化,热压焊接4根引线,超导芯片安装在抽空窗口为KRS-5的红外探测器杜瓦瓶中。77K超导红外探测器的测试性能为:NEP_(min)=1.6×1^(-9)W/Hz^(1/2),D_(bbmax)~*=4.15×10~7cmHz^(1/2)/W,R_(max)(500K)=136V/W,τ_(min)=8.8ms,λ_p=13.6μm。对超导器件的稳定性考察得出:微桥寿命最短,长桥次之,蛇形较长。一支蛇形器件经过数十次的冷热循环和电测试,寿命已超过5个月。

High T_o superconducting films YBaCuO and GdBaCuO have been adopted to prepare superconducting infrared detectors. The fabrication process includes the forming of the pattern by photolithography, the gold contacts by lift-off technique. The lead wires are made by thermopressing. Then, the element is mounted in a dewar with KRS-5 window. The performances of the superconducting infrared detectors at 77K are: NEP_(min)=1.6×10^(-9) W/Hz^(1/2), D_(bbmax)~*= 4.15×10~7cmHz^(1/2)/W, R_(max)(500K)=136V/W, τ_(min)=8.8ms λ_p=13.6μm. The stability has been examined for eleven detectors. It has been proved that the lifetime of the superconducting devices is greatly related to their structure.