摘要
用开管水平卧式液相外延系统在不同生长条件下生长了不同 x 值的MCT 液相外延薄膜。通过对外延生长工艺的控制,外延薄膜的表面形貌有较大改善,残留母液大为减少;外延薄膜的结构参数、电学参数和光学参数均有较大改善和提高。分析表明外延膜有较高的质量。短波材料和中波材料均已作出性能较高的器件。
The epitaxial films of Mercury Cadmium Telluride (MCT) with various x values have beem grown from To-rich colution in an open tube sliding system,Controlling the growth procedure makes the morphology, structure and the Electric and optic properties of MCT epi-films improve obviously,The melt remained on the film surface is reduced,The examialion to MCT epi-films shows that the films quality is excellent.The short-wave and middle-wave detectors made of LPE films have been produced successfully.
出处
《红外技术》
CSCD
1991年第6期18-22,共5页
Infrared Technology
基金
国家863高技术项目。
关键词
HGCDTE
液相外延
薄膜
红外材料
Mercury Cadmium Telluride(MCT)
Liquid Phase Epitaxy
(LPE)
Properties of films
Infrared spectrum
Substrate material
