高温超导红外探测器的研制

DEVELOPMENT OF HIGH T_c SUPERCONDUCTING INFRARED BOLOMETERS

用在两种衬底(SrTiO_3和LaAlO_3)上生长的YBa_2Cu_3O_(7-x)。薄膜制成高灵敏的热敏型高温超导红外探测器。经500K标准黑体的测量,在10Hz调制频率时,以SrTiO_3为衬底的器件,D~*(500,10,1)达8.2×10~8cm·Hz^(1/2)/W,NEP(500,10,1)达1.6×10^(10)W/Hz^(1/2);以LaAlO_3为衬底的器件,NEP(500,10,1)达10^(-11)W/Hz^(1/2)。还测量并分析了D~*和NEP随频率的变化和噪声频谱。

High T_c superconducting infrared bolometers have been developed by using two kinds of YBa_2Cu_3O_(7-x) thin films sputtered on SrTiO_3 and LaAlO_3 substrates respectively. The performances of the bolometers are measured by using a standard blackbody at 500K. The NEP(500, 10, 1) of the bolometer on SrTiO_3 is 1.6×10^(-10)W/Hz^(1/2), its D~*(500, 10, 1) is 8.2×10^(-8)cm·Hz^(1/)/W. The NEP(500, 10, 1) of the bolometer on LaAlO_3 is 10^(-11)W/Hz^(1/). The frequency dependence of the detectivity and responsivity and the noise spectrum are measured respectively and analyzed in this paper.