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激光在微电子器件制造中的应用 被引量:1

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摘要 本文简要综述激光辅助的加工技术在微电子器件制造中的应用,包括激光修复电路和掩模、激光制版、激光光刻,以及激光直接投影作图加工等情况。值得注意的是,作为微细加工关键设备的以准分子激光器为光源的分步重复光刻机近年来有了突破性进展,达到的分辨率为0.5~0.25μm,视场约15mm×15mm,能对Φ200mm的硅片以每小时十几片的生产率进行光刻,这已为生产16M DRAM(动态随机存储器)作好准备。
作者 黄印权
出处 《红外与激光技术》 CSCD 1991年第3期1-5,共5页
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