摘要
正压漏孔校准装置是一种校准气体漏率的计量标准设备 ,可采用定容法和定量气体动态比较法对正压漏孔校准 ,校准范围为 10 2~ 5× 10 - 5 Pa· L /s。该文介绍正压漏孔校准装置的校准原理 ,设计方法 ,参数选取。
The pressure leak calibration apparatus is a kind of a metrology standard for gas leak rate.The pressure leak can be calibrated with the constant volume method and the dynamic comparison method of quantitative gas.The calibration range is from 10 2 to 5×10 -5 Pa·L/s .The calibration principle,the design method and the parameters selection for the pressure leak calibration apparatus are introduced.
出处
《中国空间科学技术》
EI
CSCD
北大核心
2001年第1期57-65,共9页
Chinese Space Science and Technology