用相位偏移干涉法精确测量量块长度

Accurate Measurement of Gauge Block Length Using Phase-stepping Interferometry

讨论了相位偏移干涉技术的原理、常用的算法和小数重合法的应用。在分析了传统的柯氏干涉仪的量块测量方法基础上 ,提出运用相位偏移干涉法的量块测量法 ,最后给出了量块测量的数据。

This paper discusses the theory of the phase\|stepping interferometry.The algorithms of phase measurement utilizing this theory,and the application of the decimal coincidence.On the basis of analyzing the method of measuring gauge blocks for the Kosters interferometer,a new method,which uses the phase\|stepping interferometry,has been brought.