摘要
利用射频辉光放电法 ,通过周期性交替切换两种耦合电极的方式 ,制备了 μc- Si∶ H/a- Si∶ H多层膜 .低角度X射线衍射 (L AXRD)测试表明 ,这种多层膜具有良好的周期性结构 .观察了上述多层膜的光学性质及电导率与温度的关系 ,发现其吸收边随着 a- Si∶ H层的减薄而蓝移 ,低温下的电导激活能 Ea 随着 a- Si∶ H层的减薄而减小 .
c-Si∶H/a-Si∶H multilayers have been prepared with RF glow-discharge method in which two types of coupling electrodes are alternately changed periodically.The perfect periodic structure of the samples is determined by low-angle X-ray diffraction.The optical properties and temperature dependence on conductivity of the multilayers were observed.It is found that,as the thickness of a-Si∶H sublayer decreases,the optical gap of multilayer increases and the activation energy of conductivity decreases in low temperatures.Above results have been discussed.
基金
国家自然科学基金!资助项目 (批准号 :5 92 72 0 95 )&&
