光学针描法表面粗糙度测量及其关键技术处理

Research on Measurement of Surface Roughnessby Optical Probe

介绍了一种基于光纤传感技术的光学针描法粗糙度测量技术．它根据微观表面轮廓对光信号的调制原理，采用计算机技术进行测量控制、数据采集与处理，从而实现对表面粗糙度各常用参数的测量，并给出被测表面的轮廓图形．文中对有关测量原理及其关键技术进行了介绍，给出了实验结果及误差分析．

A new roughness measurement technique by optical probe has be en presented in this paper. The principle of the new method is based o n the intensity of light beam modulated by surface profile. In the mea surement system, process-control of measuring, data sampling and proce ssing and the output of the measurement results are completely perform anced by computer. The modulation principle, the design of fiber probe , data processing technique and experiment results were detailed in th is paper.