摘要
论述了电子束扫描正交图形簇产生畸变的非线性校正过程。通过几种典型的图形分析研究 ,推导出有关的校正函数 ,并运用计算机进行了该畸变图形的仿真处理及验证。
The process of nonlinear distortion correction of orthogonal pattern group in E-beam scanning is introduced.The related correction functions are derived throngh the analysis of several typical pattlerns.The distortion patterns are simulated and verified by computer.
出处
《微细加工技术》
2001年第2期31-34,共4页
Microfabrication Technology
关键词
正交图形簇
畸变
非线性校正
计算机仿真
电子束曝光机
scanning field
orthogonal pattern group
distortion
nonlinear correction
computer simulation
