摘要
本文详细地介绍了硅热流量传感器的工作原理并对它进行了细致的分类 ,同时概括了其发展和应用情况。
The principles and applications of a silicon thermal flow sensor are introduced in detail. The challenges for the development of the sensor are discussed and the future direction is also presensted.
出处
《电子器件》
CAS
2001年第1期41-47,共7页
Chinese Journal of Electron Devices