摘要
阐述了热式质量流量传感器的原理和结构。用铂膜电阻作为感温元件,研制了气体质量流量计,并给出试验结果。这种流量计具有性能稳定、响应速度快和制作方便等优点。
The principle and structure ot thermal mass flow transducer are described in (?). With Pt film resistor used as the temperature sensors, a mass flowmeter for gases is developed and the test result is also given. The flowmeters has the advantages of easily making, fast responce and high stability of performance.
关键词
气体
质量流量计
传感器
铂膜电阻
mass flowmeters
sensors
thermosensitive element
resistors
measuring circuit
