利用光纤共焦扫描显微镜的轴向响应曲线测定压电陶瓷的逆压电伸缩效应

Measurement of Converse Piezoelectric Expend and Contract of PZT with the Axial Response Curve of Fiber Optical Confocal Scanning Imaging Microscope

在光纤共焦扫描显微镜 (FOCSM)的基础上 ,利用其轴向响应曲线的线性部分 ,给出了一种测定物体微位移的新方法。并用该方法精确测量了压电陶瓷微小的逆压电伸缩效应 ,分辨率可以达到 5nm。

By utilizing the axial response curve of fiber optical confocal scanning microscope, a new technique for measuring the micro position has been developed. Using this technique, the converse piezoelectric expend and contract of PZT with resolution as high as 5 nm was measured.