溶胶-凝胶法制备BST铁电薄膜及性能研究

PREPARATION OF (Ba _(0.5) Sr_( 0.5))TiO 3 THIN FILM BY SOL GEL TECHNIQUE AND ITS CHARACTERISTICS

研究了一种以水为溶剂的 (Ba0 .5 Sr0 .5 ) Ti O3(即 BST)液体源溶液 ,用 Sol- Gel技术制备出 BST薄膜 .性能测试结果表明 ,厚度为 16 0 nm70 0℃保温 1h的 (Ba0 .5 Sr0 .5 ) Ti O3薄膜具有较好的结构、介电性能和漏电流性能 :在室温下 ,其为纯立方钙钛矿相 ,介电常数为 2 2 5 ,介电损耗为 0 .0 44 ,漏电流密度为 8.0× 10 - 8A/ cm2 .进一步研究发现 ,随着烧结温度的升高 ,漏电流降低 。

(Ba0.5Sr0.5)TiO3 ferroelectric thin films were prepared by Sol-Gel processing. Films with thickness of 160nm treated at 700 degreesC for 1h showed pure perovskite structure and good dielectric, insulating properties, i.e. a dielectric constant of 225, a dielectric loss of 0.044, a leakage current density of 8.0x10(-8)A/cm(2). The leakage current density was found to depend on the annealing temperature. The measurement of the J-V characteristics on films indicated the conduction process to be bulk-limited.