室温工作双敏感膜HSGFET型O_3传感器的研究

HSGFET Ozone Sensor with Dual Sensitive Layer Operating at Room Temperature

本文研究室温下工作 ,具有双敏感膜 ,检测ppb范围内O3 浓度的复合悬浮栅FET(HybridSuspendedGateFieldEffectTransistor即HSGFET)型臭氧传感器 .文中给出了四种固态HSGFET型臭氧传感器的实验结果 ,发现具有 [KI/A/LaF3]结构的传感器对O3有很好的响应特性 ;实验结果与由开尔芬 (Kelvin)探针得到的结果进行了比较 .

This paper studies hybrid suspended gate FET (HSGFET) ozone sensor with dual sensitive layer for detecting ozone in ppb range at room temperature. From the results of our experiments for the four solid HSGFET ozone sensors, we found the sensor with [KI/A/LaF3] structure has excellent response to ozone. Results obtained by the HSGFET correspond to those obtained by the Kelvin probe.