用准分子激光CVD制作SnO_2微透镜及其阵列的技术研究

Study on the fabrication technology of SnO_2 microlens and its array by using excimer laser-CVD technique

本文利用准分子激光ＣＶＤ技术以液态ＳｎＣｌ４和氧气为源制出了半径４５μｍ的ＳｎＯ２薄膜微透镜及微透镜阵列。并从反应机制和生长规律出发对这一生长技术特点和前景进行了阐述。

Here we fabricate a microlens with 45μm radius and its array with liquid SnCl4 and oxygen as the sources by using excimer laser CVD technique. Acording to its growing mechanism and growing law, we also show the characteristics and the prospects of this technology.