目标识别新算法的研究与应用

New algorithm study and application for target recognition

文中提出一种新的目标识别算法———形状尺寸对比度滤波器算法 ,它是在尺寸对比度滤波器的基础上 ,加上目标形状特征 ,克服了原单一回形结构算法的局限性 ,使算法可准确地识别具有特定形状和尺寸的目标。针对硅片对准八字标记 ,介绍了算法的基本原理和结构参数设计。通过对算法的分析及工程实际应用 ,有效地验证了该算法识别目标的正确性 ,并证实其特点。

A new algorithm called shape size contrast filter-SSCF is described in this paper. The target shape feature is considered and the limitation of size contrast filter with single loop structure is overcome. With this algorithm, the target of specific shape and size can be recognized correctly. The principle and structure parameter determination are introduced here by an example, where the “八” mark on the wafer should be aligned. The advantage of accuracy to recognize targets is proved. \;