摘要
本文以理论公式为基础,分析计算了层流洁净室中亚微米粒子非等动力采样所产生的相对误差值;通过在洁净风洞中的实验研究,得出了非等动力采样所引起的误差。指出对层流洁净室检测应遵守等动力原则。
Besed on the theoritical formulas, this paper analysed and calculated the relative error caused by non-isokinetic sampling of sub-micron particles in cleanroom. And errordetecting of non-isokinetic sampling was obtained by experiment in laminer dearoom. It indicated that isokinetic rule must be observed in engineering detection.
