摘要
本文采用CW超声分子束以及时间分辨质谱技术研究在紫外(355nm)和可见(560nm)激光照射下Cl_2和InP(100)表面反应产物的质量分布.同时以调制分子束技术和锁相放大探测方法研究了在表面温度300K-800K范围内Cl_2和Inp(100)热反应产物的质量分布。并测定了主要产物信号InCl^+,InCl_2^+,PCl^+,PCl_2^+,PCl_3^+的信号强度与表面温度的关系,对于反应机理作了讨论.
The mass distribution of the products for the Cl_2 and InP(100)surface reaction under 355nm and 560nm laser irradiation has been studied using CW supersonic molecular beam technique coupled with time resolved mass spectrometry. The mass distribution of the products for thermal reaction at surface temperature range of 300K-750K has also been studied by a chopped molecular beam and quadrupole mass spectroscopy using Lock—in amplifier technique. Detailed analysis of the surface temperature dependence of the ion singals of the products InCl^+、 InCl_2^+、 PCl^+、 PCl_2^+、 PCl_3^+ is performed. The mechanism of the reaction is discussed.
基金
国家自然科学基金
