激光干涉数字化角度计量系统分析

Analyse of a digital angle measurement system based on laser interferometer

通过对数字干涉测角系统的组成、原理、误差、精度等方面的阐述与分析介绍了一种新型的精密角度测量系统。该系统是基于激光干涉技术的一种角度测量系统 ,系统以激光作为干涉光源 ,迈克耳逊干涉仪作为角度量测量的核心装置 ,通过机械装置将角度 (角位移 )量转换为迈克耳逊干涉仪干涉光路中可反映光程差变化的线位移量 ,进而反映为干涉条纹的变化 ,最后通过有关电路对干涉条纹进行的一系列处理 ,实现了对大转角的精密测量。

A precise angle measurement system based on laser interference technology was presented by expatiating upon and analyzing the component, principle, error and precision of the system. The system takes advantage of laser as its light source, and Malchlson interferometer as its main angle measurement equipment. An exact angle measurement system towards big angle was realized by changing the angle displacement to line displacement so that the change of optical path difference through mechanical equipment and special circuits can be reflected. The quantitative analyses computer simulation was also presented.