高测速双频激光干涉仪

High measurement speed dual frequency laser interferometer

现代机械工业的发展使得数控机床和三坐标测量机等的运行速度已经达到 10 0 0 mm/ s,而目前商用外差干涉仪的测量速度不能满足这一要求。为此研制了一种基于 5 MHz频差双反射膜激光器的高测速干涉仪。通过实验对干涉仪的测量速度进行了验证。实验证明 ,该种干涉仪可以对速度为 10 0 0 mm/

With the development of the mechanical engineering, the moving velocity of the machine centers and the CMMs are increased to 1000 mm/s However, at the present time the measurement speed of the commercial heterodyne interferometer can not meet the requirement A high measurement speed interferometer based on a kind of a 5 MHz beat frequency be-reflectance laser is presented Experiments are setup to testify the measurement speed of the interferometer Results show that this kind of interferometer can be used to measure the displacement of an object whose velocity is 1000 mm/s