摘要
充分利用 CCD技术和计算机的图像处理能力 ,在满足大多工业精度要求的前提下 ,研制成了一种低成本、大视场的 CCD显微测量仪 ,用于光学元件的检测。当线视场为 10 mm时 ,该系统的横向分辨率可达 12 .9μm,精度可达1μm,纵向分辨率可达λ/8。
According to the requirement of most industry accuracy, a low cost, large visual field matrix CCD instrument for micro measurement is developed, by making the best of the CCD technology and the image processing ability of computer It can be applied in detecting of the optical component When the linear visual field is 10mm, the height and lateral resolution of the system are λ/8 and 12 9μm respectively, the accuracy can be at 1μm All of these can meet the requirement of general industrial detection completely
出处
《光学技术》
CAS
CSCD
2001年第3期266-267,271,共3页
Optical Technique
