摘要
SOI技术作为 2 1世纪的硅集成技术正在日益受到人们的青睐。从SOI技术的发展过程、制备工艺、开发应用及市场预测几个方面评述了SOI技术现状及前景。
As a silicon integration technology in the 21st century,silicon-on-insulator (SOI) is becoming favourite increasingly. This paper describes the current situation and prospects of SOI in terms of SOI's development,process,research,application and market prediction.
出处
《电子工业专用设备》
2001年第1期15-22,共8页
Equipment for Electronic Products Manufacturing
