光栅掠入射腔对ArF激光线宽的压缩和调谐

Compression of Spectral Width and Wavelengh Tune of ArF Laser by Using Swept Grating

对国内首次研制成功的 Ar F准分子激光器实现了窄线宽可调谐运转 ,提出并利用光栅掠入射腔实现了线宽小于 0 .0 2 0 nm的窄线宽和连续调谐运转 ,注入到放大级实现了脉冲能量大于 40 m J的窄线宽可调谐激光输出。设计利用氧气吸收光谱对处于真空紫外的 Ar F激光实现了波长标定和线宽的准确测量。

A discharge pumped ArF laser oscillator amplifier system was improved independently,and a spectral width less than 0.020 nm had been obtained by using swept grating.The output of oscillator was injected into the amplifier,and the laser system produced 40 mJ/pulse,tunable,narrow spectral width and very low beam divergence laser.And the exact values of the wavelength as well as the spectral width of the ArF laser were measured b using Oxygen absorption spectrum.