真空还原制备的VO_2热致相变薄膜光学性质研究

Optical properties of VO _2 thermal induced thin films prepared by vacuum annealing process

本文对不同衬底制备的VO2 薄膜进行了表面形貌测试 ,对其红外透射光谱和Raman光谱进行了研究 ,并进行 370nm -90 0nm波段的光透射测试以及 90 0nm波长的热滞回线特性测试 ,表明所制备VO2 薄膜具有优良的热致相变光学特性 ,薄膜为纳米结构 ,并且结晶状态不同的薄膜其Raman谱位置有明显改变 ,室温时的红外光谱表现出较好的红外振动特性。讨论了薄膜结晶状态对Raman位移的影响以及VO2

VO 2 thin films were prepared on Si(100) and solid glass substrates by the vacuum annealing process.The surface property of the films was characterized by SEM analysis.The IR and Raman spectra were performed on films.The UV-VIS spectra and transmittance temperature hystersis at 900nm of the films were studied.The experimental results show that the films exhibit good thermal induced reversible phase transition and have nanostructure.The film with different XRD patterns show diverse Raman peaks.The obvious intensity and peaks of IR spectra indicate VO 2 thin films have good structure properties.The reasons that the Raman spectra change so remarkably and obvious IR transmittance spectra properties are discussed.