硅基微机械微波传输线特性阻抗的数值分析

Numerical Analysis of the Characteristic Impedance of Micromachined Microwave Transmission Lines

在相似剖分有限元方法的基础上 ,结合硅基微波共平面传输线的特点 ,采用混合相似剖分技术 ,对这种长度为毫米级的悬浮传输线的特性阻抗进行了数值分析 ,主要讨论了刻蚀工艺的变化对其特性阻抗的影响。

A new similarity method in FEM is presented for researching of micromachined microwave coplanar waveguide, which can be fabricated through a commercial CMOS process. By using this new method, we calculate the characteristic impedance of this kind of suspended waveguide and analyze the change with its dimensions.From the result,we especially discuss the effect of the etching procedure on the characteristic impedance.