摘要
用射频 等离子体化学汽相沉积法 ,在硼玻璃基片上淀积了厚为 1.8μm的a C∶H光吸收层 ,实验证明这种光吸收层的吸收系数受工艺条件的影响。测得在最佳工艺条件下 ,该吸收层对红光、绿光和蓝光的吸收系数分别为 3.4× 10 4 ,5.4× 10 4 和 9.8× 10 4 cm- 1。讨论了典型的液晶光阀投影机对吸收层光吸收系数的要求。
The light absorption layer with 1.8 μm thick hydrogenated amorphous carbon(a-C∶H) film is deposited on boride-glass by RF-plasma enhanced chemical vapor deposition (RF-PECVD) technique. Dependence of light absorption coefficients of the a-C∶H film on technology conditions is measured. Absorption coefficients for red, green and blue light are obtained with the optimum technology through experiment. The requirements on light absorption coefficient for classic projection display system in liquid crystal light valve are discussed.
出处
《半导体光电》
CAS
CSCD
北大核心
2001年第3期204-206,共3页
Semiconductor Optoelectronics
基金
安徽省自然科学基金资助项目!(99JL0 191)
关键词
液晶光阀
光吸收层
光吸收系数
liquid crystal light valve
light absorption layer
light absorption coefficient
a-C∶H film
RF-PECVD
