摘要
简略介绍了椭偏仪的测量原理和测量装置。分析了Hg1-xCdxTe(MCT)的组分与椭偏仪的参数Δ和 ψ之间的关系 ,结果发现碲镉汞的组分x主要与椭偏仪的参数 ψ有关 ,而且x与 ψ的经验关系为 ψ =14.84 - 10 .2 2x。最后用椭圆偏振测量的方法分析了碲镉汞的横向和纵向组分均匀性。该方法具有非破坏性、有效、快捷的特点。
Principle of ellipsometric measurement is presented and ellipsometry is briefly described, followed by analysis on the relationship between the composition of HgCdTe and the ellipsometric parameters ( and Δ). It is found that the ellipsometric parameter is chiefly correlated with composition x, and x has an approximately linear relationship to . Finally, the transverse and longitudinal compositional uniformity of HgCdTe is analyzed by ellipsometric measurement which is a nondestructive, effective and rapid analytic method.
出处
《半导体光电》
CAS
CSCD
北大核心
2001年第3期224-226,共3页
Semiconductor Optoelectronics
基金
原云南工业大学校立基金资助项目! (980 10 )
