镍薄膜电阻作为多功能传感器的温度敏感元件

Nickel film resistors as temperature sensitive components in pressure and temperature multifunction sensors

为解决铝薄膜和银薄膜电阻率小、热敏电阻灵敏度低、耐腐蚀性差、工作温度低等问题 ,提出镍薄膜电阻可以作为温度敏感元件集成在压力传感器上 .对镍薄膜热敏电阻的制备方法、温度敏感特性进行了分析与实验研究 ,并将其集成在耐高温压力传感器上 ,对制备的压力 -温度多功能传感器进行了测试 .结果表明传感器可在室温至 2 0 0℃温度范围工作并达到较高精度 ,可以推广使用 .

Presents the nickel film resistors integrated in multifunction sensors as temperature sensitive components, studies the preparation and temperature property of resistor and the integration of the resistors in high temperature pressure sensors to produce multifunction sensors, and concludes from experimental results that the sensors can work at a room temperature up to 200℃ with higher precision, and the resistor can be used widely.