128×128凹型GaAs微透镜阵列器件的制作研究

Research on Fabrication of 128×128 Element GaAs Concave Microlenses Array Device

提出了一种制作 12 8× 12 8球冠型GaAs凹折射微透镜阵列新的方法———曲率倒易法。扫描电子显微镜(SEM )显示微透镜阵列为表面轮廓清晰的凹球冠面阵列 ,表面探针测试结果显示阵列表面光滑、单元重复性好 ,其凹深为 1 2 6 8μm ,焦距为 - 35 2 0 4μm。

128×128 element GaAs microlenses array is fabricated by a new method, named curvature inversion method. Scanning electron microscopy observation shows that the microlenses array has distinct spherical and concave contour, and surface stylus measurement shows that the microlenses array has smooth surface and its elements are of the same size. The depth of concave spherical surface is 1.268 μm, and the focal length is -352.04 μm. The structural diagrams of photolithography mask pattern are given.