摘要
设计光子能量范围为 2 5 0～ 75 0eV ,可覆盖C、N、O、F的K边界以及过渡金属直至Fe的L边 .设计的空间分辨率为 5 0～ 1 5 0nm ,具备发展到 30nm的能力 .重点考虑了相干辐射的传输 ,分析了水平和垂直方向的相空间匹配问题 .引入冗余照明的概念 ,以实现波带板的空间相干照明以及降低束线对光源不稳定性及元件振动的要求 .设计输出光通量可达 1 0 9phs/ (s·0 .1 %BW ) .谱分辨率 (E/ΔE)标称值 30 0 0 ,并可根据不同实验调整 .实验站设计样品可放在真空、氦气和大气环境中工作 .
In the present design, the selected photon energy range is 250—750eV which covers the K edge of C, N, O, F and the L edge of transition elements up to Fe. The nominal spatial resolution is 50—150nm and there is also potential to 30nm. Special consideration was paid to the transportation of coherent flux and phase space matching in horizontal and vertical directions. The concept of redundant illumination is introduced to ensure the coherent illumination of zone plate and reduce the effect of source instability and element vibration. The designed flux output is 10 9phs/(s·0.1%BW). The nominal spectral resolution (E/ΔE) is 3000,and can be adjusted according to different experimental requirements. The experimental station is designed to enable the sample staying in vacuum, helium and atmosphere.
