微波无极放电等离子体的温度分布轮廓

The Temperature Distribution of Microwave Electrodeless Discharging Plasma

应用Elenbass Heller局部能量平衡方程及TM0 10 模式下的微波场Maxwell方程 ,在简化的物理模型基础上采用数值计算的方法模拟得微波 (2 45 0MHz)无极放电的Hg等离子体的温度分布轮廓 .通过自建实验装置的实验测量 ,将理论模似与实验结果进行对比验证 .最后用趋肤效应的理论解释微波激发等离子体温度分布的特点 .

Elenbass Heller local energy equation and Maxwell's equations in the cylindrical TM 010 mode were used to describe a simplified microwave discharging mode, then numerical procedure was applied so that the temperature distribution of microwave (2 450 MHz) discharging Hg plasma can be simulated. The simulation was acceptable compared the experiment result.The characteristic of temperature distribution of microwave discharging plasma was explained with skin effect theory.