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钽表面离子渗氮工艺研究 被引量:5

Experimental Research of Plasma-nitriding of Tantalum
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摘要 采用组合的二次回归正交设计方法 ,针对表面硬度、表面粗糙度 ,对钽表面离子渗氮工艺参数 (气体压力、温度、氢气摩尔分数 )进行了优化。 The combined quadratic orthogonal regressive method of experiment was employed in this paper to explore the effects of process parameters of plasma nitriding of tantalum such as total pressure,temperature and original hydrogen mole fraction on the hardness and roughness of nitriding surfaces.The regression equations of hardness and roughness are given according to the results of regression and statistic analysis.
出处 《材料热处理学报》 EI CAS CSCD 北大核心 2001年第2期48-50,共3页 Transactions of Materials and Heat Treatment
关键词 离子渗氮 工艺研究 正交设计 回归方程 tantalum plasma nitriding technique
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