摘要
用X射线光电子能谱 (XPS)和小掠射角X射线衍射 (GXRD)研究了铝合金LY12等离子体基离子注入氮 /钛改性层的结构。结果表明 ,氮在注入层呈高斯分布 ,而钛沿注入方向逐渐减少。钛的注入对已注入的氮的分布有重要影响。钛的等离子体密度直接影响钛在改性层中的成分、相结构。改性层主要由TiO2 ,Al2 O3 ,AlN ,TiAl3 ,TiN或Ti组成。
The structure of the aluminum alloy LY12 implanted with N/Ti by plasma based ion implantation (PBII) was characterized using X ray photoelectron spectroscopy (XPS) and glancing X ray diffraction (GXRD). XPS measurements show that N and Ti can be implanted into LY12 effectively, and the depth profile of N in the layer is near the Gaussian distribution, and that of Ti decreases gradually along the implanting direction. The process of implanting Ti has an important influence on the depth profile of the pre implanted N. The plasma density of Ti can affect the composition and phases in the modified layer consisting of TiO 2, Al 2O 3, AlN, TiAl 3 TiN or Ti. [
出处
《中国有色金属学报》
EI
CAS
CSCD
北大核心
2001年第3期449-453,共5页
The Chinese Journal of Nonferrous Metals
基金
国家自然科学基金资助项目 ( 5 97710 5 9)
