环境扫描电子显微镜中真空系统特点及成像信号分析

VACUUM SYSTEM AND IMAGING SIGNAL IN ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE

环境扫描电子显微镜（ESEM）是针对常规扫描电子显微镜（SEM）在使用过程中暴露 出来的一些重大缺陷而设计的。它淘汰了SEM中繁琐、复杂的样品准备工作，扩大了仪器的 使用范围，并使图像更清晰。着重介绍了ESEM的工作原理、与此有关的真空系统构成及成像 信号分析。

Environmental Scanning Electron Microscope（ESEM）is designed to imp rove the capability of conventional Scanning Electron Microscope (SEM).It elimin ates the most trivial and complex sample preparation needed in SEM and extends t he range of the application of the instrument. It can also provide the clear and natural image of the sample. The principle of ESEM, the vacuum system used in E SEM and its imaging signal are introduced.