金刚石薄膜和类金刚石薄膜

Diamond Thin Films and Diamond-like Carbon Coatings

本文介绍了金刚石薄膜和类金刚石薄膜的制备与薄膜性能分析方法,也介绍了它们的应用前景。本文给出了华北光电所研究类金刚石薄膜的结果。

In this article techniques for depositing and evaluating diamond films and diamond-like carbon coatings is demonstrated. We gave the result of the diamond-like films research in the North China Research Institute of Electro-optics.