14～16μm红外带通滤光片及其主要工艺技术

14～16μm Infrared Range Bandpass Filters and Their Main Processing Technique

14～16μm红外带通滤光片成功地应用于我国自行研制的二十余颗卫星上。本文介绍了该滤光片的膜系和光学特性,比较详细地介绍了主要工艺技术:即滤光片转动机构和换片机构的温度平衡,加温方式与膜层吸收的关系,基片温度的控制,膜系测控,以及它们对滤光片光学特性的影响。

The 14～16μm bandpass filters have been succcessfully used in more than twenty satellites developed by our country: Here we introduse the real layer system and the optical characteristics of this kind of filter, and the details about the main technique including the temperature balance between the fliter rotary drive and the testglass changer, the relation between the way of heating and the layer absorb, the substrates temperature control, the optical film thickness measurement and control, and the influence of above factors on the filter's optical characteristics.