高速钢上TiN镀层的硬度和粘附性能

Hardness and Scratch Adhesion of TiN Coated on High Speed Steel

本文利用显微硬度和划痕粘附性测量技术,对采用HCD方法涂镀在高速钢上的TiN镀层的力学性能进行了研究。结果表明,TiN镀层的显微硬度(Hv)、超显微硬度(UMH)和临界载荷(L_c),受基体偏压、氮气分压和镀层厚度的影响,镀层的择优取向强烈地影响着镀层的显微硬度,在一定的值域内,镀层内应力增加,临界载荷下降。 讨论了影响临界载荷的各种因素,确定了制备具有优良力学性能的TiN镀层的工艺参数。

The present paper narrates the mechanical properties of TiN coating on high speed steel prepared by HCD ion plating which were studied with the aid of microhardness. measurement and scratch adhesion testing. The results show that the microhardness(Hv), ultra-microhardness (UMH) and critical load (L_c) of TiN coatings are influenced by substrate negative bias, nitrogen partial pressure and film thickness. Especially, the preferred orientation of the coating strongly affect their microhardness. Within certain value range, critical load decreases with the increase of residual stress of TiN coating. Various factors affecting critical load of TiN coatings are discussed. The technological parameters used in preparation of TiN coatings with good comprehensive mechanical properties are determined.