摘要
常压辉光放电 (APGD)是新近发展起来的一种等离子体源 ,与低气压辉光放电相比更具有工业应用前景 .本文详细介绍我们实验室在大气压条件下建立的均匀稳定、介质垒控制的辉光放电等离子体发生装置 .该放电发生器采用频率为 1 0 k Hz和 2 0 k Hz高压电源 ,平板电极结构 ,电极覆盖绝缘层 ,间隙2～ 3mm,可在多种气体环境下稳定运行 .放电电流波形和电压 -电荷李萨如图形的测量充分表明它确实是常压下的均匀辉光放电 .
The atmospheric pressure glow discharge (APGD)is a new kind of plasma source that has been recently developed. It has wider industrial application prospects compared with low-pressure glow discharge. A stable, homogeneous glow discharge plasma device produced in our laboratory and controlled by dielectric barrier at 1atm is introduced in detail. It is capable of operating by using 10/20KHz-power supply, a parallel plate configuration with electrodes being covered by insulating surfaces, 2mm of gap distance and many kinds of working gases. The measurements of the discharge current pulse shapes and lissajous figure of voltage-electric charges provide sufficient evidence that this is really a uniform glow discharge at atmospheric pressure.
出处
《佳木斯大学学报（自然科学版）》
CAS
2001年第2期125-129,共5页
Journal of Jiamusi University：Natural Science Edition
基金
国家自然科学基金资助项目 (项目号 10 0 0 75 0 10 )
